Lagrange Form of the Interpolating Polynomial 17
The Lagrange form of the interpolating polynomial is
cp(φ) = (φ−12.3)(φ−27.3)(φ−45.8)(φ−69.6)(φ−100.0)
(−6.42)(−21.42)(−39.92)(−63.72)(−94.12) ·0.995 +
Evaluating this polynomial for φ= 5,10,15,…,100% produces the values given in
the following table.
φ5 10 15 20 25 30 35 40
16. The table below lists the linewidth of a printed feature on a semiconductor
device as a function of the dissolution time (the amount of time the silicon
wafer is placed in the developer solution).
Dissolution Time (sec) 10 12 14 16 18 20
Linewidth (µm) 0.25 0.36 0.45 0.50 0.53 0.55
(a) Approximate the linewidth of the feature after a dissolution time of 15
seconds.
(b) Plot the values in the table, together with the value obtained in part (a).
Does the result from part (a) seem reasonable? Explain.
(a) Let Ldenote the linewidth and Tdenote the dissolution time. Then
L(T) = (T−12)(T−14)(T−16)(T−18)(T−20)
(−2)(−4)(−6)(−8)(−10) ·0.25 +